（建议看）基于ICPF驱动器的一种新型的PDMS膜片微型泵.pdfVIP

Proceedings of the 2010 IEEE International Conference on Robotics and Biomimetics December 14-18, 2010, Tianjin, China A Novel PDMS Diaphragm Micropump Based on ICPF Actuator Wei Wei, Student Member, IEEE, Shuxiang Guo, Member, IEEE Abstract—This article presented the development of a novel the actuating principles of the reciprocating diaphragm. polydimethylsiloxane (PDMS) micro pump based on ICPF Taking the typical structure of diaphragm micropumps for (Ionic Conducting Polymer Film) actuator toward biomedical example, it consists of the actuating unit, chamber and flow system and drug delivery system. ICPF actuator provided an rectifiers [5]. Reciprocating flows can be got in the actuating approach for the demand of the miniaturization and microchannels, for the reciprocating motion actuated by low actuation voltages. This micropump is composed of ICPF equipped in a sealed actuating chamber, two check valves which external force which is lead to the chamber have regular are normally closed. Due to ICPF bending force and thermo volume changes. Van Lintel et al. fabricated the first pneumatic force generated by Joel heat, the PDMS diaphragm diaphragm micropump actuated by piezoelectric [6]. Since which adheres to the ICPF is driven reciprocating. So the liquid then, several kinds of external driving sources were applied in the working liquid chamber can be pumped from inlet to on the diaphragm micropump. A silicon micropump based on o