双驱动三自由度混合平台的精密运动控制外文文献翻译英文原文.doc

PublishedinIETControlTheoryandApplications Receivedon16thFebruary2007 Revisedon24thJuly2007 doi:10.1049/iet-ctaISSN1751-8644 Precisionmotioncontrolofathreedegrees-of- freedomhybridstagewithdualactuators Y.Park MechatronicsandManufacturingTechnologyCenter,SamsungElectronicsCo.,Ltd.,416,Maetan-3dong,Yeongtong-gu, Suwon-City,Gyeonggi-do443-742,RepublicofKorea E-mail:ym-park@kaist.ac.kr Abstract: The author presents athree degrees-of-freedom precision hybrid stagethat can move and align an object onitforthemeasurement ofitsthree-dimensional image usingtheconfocalscanning microscope.The hybridstageconsistsoftwoindividuallyoperatingx2y2ustages,calledthecoarsestageandthe?nestage. Thecoarsestageisdrivenbythethreelinearmotorsandproducestheinitialmovementofanobject.Onthe other hand, the ?ne stage is driven by the fourvoice coil motors and provides the ?nal alignment ofit with sub-micron metre accuracy. For control of the hybrid stage, a precision motion controller is proposed. The precision motion controller consists of a position and velocity control loop, an anti-windup compensator to eliminate thewindup problem that occurs inthecontroller,agenerator ofoptimal force,aprecision position determiner to determine the exact position of the ?ne stage and a perturbation observer to observe the perturbation ofthe?nestageandcompensate it.Theperformances oftheprecision motion controller ofthe hybridstageareevaluatedbyexperimentwithahardwaresetup. 1 Introduction low-speed motion and resonance mode in high-frequency motion. Thus, it is very dif?cult to achieve precision motion control performance with only coarse actuators although they provide large travel. One of the methods to overcome their limitation is adopting ?ne actuators such as piezoelectric actuator or voice coil motor (VCM). But, the travel of ?ne actuators is about several hundreds of micron metres to several millimetres, which is the limitation of them. Thus, if we design a hybrid actuation system