ppt课件-sugar-acomputeraideddesigntool.pptVIP

Modeling MEMS Sensors[SUGAR: A Computer Aided Design Tool for MEMS ] UC Berkeley James Demmel, EECS Math Sanjay Govindjee, CEE Alice Agogino, ME Kristofer Pister, EECS Roger Howe, EECS UC Davis Zhaojun Bai, CS January, 2004 Sugar Project Objective “Be SPICE to the MEMS world” open source and more SUGAR: Simulation Capabilities Resonant MEMS Systems Essential element in RF MEMS signal processing Specific signal amplification in physical and chemical sensors Bulk Acoustic Waves for 1 - 100 GHz Traditional analytic design methods frustratingly inadequate; Abdelmoneum, Demirci, and Nguyen 20