epitaxial piezoelectric pb( ) thin films on silicon for energy harvesting devices压电pb()薄膜外延硅能源收割设备.pdfVIP
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epitaxial piezoelectric pb( ) thin films on silicon for energy harvesting devices压电pb()薄膜外延硅能源收割设备
Hindawi Publishing Corporation
Smart Materials Research
Volume 2012, Article ID 426048, 7 pages
doi:10.1155/2012/426048
Research Article
Epitaxial Piezoelectric Pb(Zr0.2Ti0.8)O3 Thin Films on Silicon for
Energy Harvesting Devices
A. Sambri,1, 2 D. Isarakorn,3 A. Torres-Pardo,4 S. Gariglio,1 Pattanaphong Janphuang,3
3 ´ 4 5 1 3 5
D. Briand, O. Stephan, J. W. Reiner, J.-M. Triscone, Nico F. de Rooij,
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