ellipsometry data analysis-椭圆偏振技术.pdfVIP

Ellipsometry Data Analysis: a Tutorial G. E. Jellison, Jr. Solid State Division Oak Ridge National Laboratory WISE 2000 University of Michigan May 8-9, 2000 Motivation The Opportunity: Spectroscopic Ellipsometry (SE) is sensitive to many parameters of interest to thin-film science, such as • Film thickness • Interfaces • Optical functions (n and k). But