An Overview of Buried Oxides on Silicon New硅上埋藏氧化物综述 过程与辐射效应.pdfVIP

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An Overview of Buried Oxides on Silicon New硅上埋藏氧化物综述 过程与辐射效应.pdf

An Overview of Buried Oxides on Silicon: New Processes and Radiation Effects Jean-Luc Leray, Philippe Paillet, Jean-Luc Autran To cite this version: Jean-Luc Leray, Philippe Paillet, Jean-Luc Autran. An Overview of Buried Oxides on Silicon: New Processes and Radiation Effects. Journal de Physique III, EDP Sciences, 1996, 6 (12), pp.1625-1646. 10.1051/jp3:1996205. jpa HAL Id: jpa https://hal.archives-ouvertes.fr/jpa

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