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IntegratedLightprocesspump
A100L
IntegratedpumpofferLoad-lockpumpsA100LTheleadingintegrateddrypumpinstalledbase7500unitsFieldprovenhighreliabilityReducedhook-upcostsLownoise,lowvibrationlevelStandardpumponmanytoolsPumpingspeed:95m3/h
MainfeaturesNonitrogenpurge
Sophisticated,yetsimplemonitoring
TheA100Lisdedicatedtocleanapplications:Load-lockandtransferchamberPVDSEMIMPLANT(endstation/beamline)PrecleanAnnealchambersA100LforCleanapplications
A100Ltechnology
A100L-AcousticPRESSURE:controlonproductionlineAveragevalue:
56dBATestconditions(controlrate=100%)-Inletwithblank-offflange
-Outletwithblank-offflange
-Pumpatultimatepressureandmaximumrotationalspeed-Pumpatrunningtemperature(1hourrunningtime)
-Pumponarollertable1mNoisemeter1mRejectlevel:
58dBAAcousticPower:Lownoiselevel
MicrophoneAutomaticTest:noinfluenceofoperator-Result=averageon10measurements,doneevery5secduring50secAutomatictestbenchwithdataacquisitionProductiontestset-upSpecialroomwithnoiseinsulationAcousticPower:LownoiselevelSeptember2008-6Drypumppresentation
BenefitsLowenergyconsumptionSaveroominbasementReducesfacilitiescostsHigherthroughput(L/L)RemoteversusintegratedAdvantagesoftheconcept
WiththeA100Reducedfootprintandvolume
Higherthroughput(LoadLock)40%FasterPump-down40%fasterwithA100Lclosetothetoolcomparedtobasement
Atworldwideclassend-userlocationinAsiaA100LSub-floorinstallationToolforpumpinstallationSeptember2008-10Drypumppresentation
Atworldwide-classend-user
locationinEuropeA100LSub-floorinstallationSeptember2008-11Drypumppresentation
Pumpingspeedupto45%higherthancompetitorQuarterofthesizeofconventionalpumpsLowestnoiselevel,lowvibration,cleanroomcompatibleVariablespeedcapabilityforoptimumpumpingperformanceFirstpumpjointlydevelo
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