半导体曝光机的培训资料.pptVIP

* DUV SCANNER I-LINE SCANNER System overview SCANNER FUNCTIONS Function Gets resist-coated wafers from the Track Expose the wafers Sends the wafers back to the Track for developing The pattern to expose is on the reticle. The scanner will align the reticle so that the pattern can be exposed accurately on the wafer. Some parameters: Exposure energy and Focus Exposure Field P, E and D chucks Primary Makers Alignment OVERVIEW OF SYSTEM DUV Scanner I-line Scanner The DUV scanners are connected to the DUV Tracks. For critical layers The I-line scanners are connected to the I-line tracks. For non-critical layers. OVERVIEW OF SYSTEM D-chuck E-chuck P-chuck Robot In Out 1 2 3 4 OVERVIEW OF FUNCTIONS Sequence of events Edge Pre-alignment Optical Pre-alignment Global Alignment Exposure Discharge EDGE PRE-ALIGNMENT What is Edge Pre-alignment?? During Edge Pre-alignment, the scanner looks for the notch on the wafer. This will tell the machine the orientation of the wafer. This is to enable the machine to place the wafer accurately on the P-chuck. How does it work?? The wafer is rotated under a laser beam along the edge The beam will search for the notch at the wafer edge Why do we need Edge Pre-alignment? So that the wafer will be placed accurately on the P-chuck. OPTICAL PRE-ALIGNMENT What is Optical Pre-alignment? A sensor looks for the Primary Markers on the wafer. This improves the accuracy of the Edge Pre-alignment How does it work?? The wafer is rotated under a optical sensor. The sensor will look for the 2 Primary Markers on the wafer Why do we need Optical Pre-alignment?? This improves the accuracy of the Edge Pre-alignment. GLOBAL ALIGNMENT What is Global Alignment?? During global alignment, the wafer is very accurately aligned. The reticle is also aligned. Global Alignment is done on the P-Chuck How does it work?? The scanner will align using the Primary Markers on the wafer Why do we need Global Alignment This is the final alignment before exposur