欧洲感光鼓保护膜制备技术.doc

The Research of DLC Protective Films for OPCs The deposition of a protective film to increase the hardness of an organic photoconductor (OPC) surface is an effective method of lengthening the lifetime of the OPC. In this work, diamond-like carbon (DLC) protective films were deposited onto OPC samples by the electron cyclotron resonance (ECR)-microwave plasma chemical vapor deposition (MPCVD) method with low substrate temperature. The DLC films were deposited with optimized deposition conditions and exhibited high transmissivity and high electrical resistivity. The films caused a remarkable increase in the hardness of the OPC surface, by a factor of 2.5-5.4. The acceptance voltage, dark decay rate, photo discharge rate, and contrast potential of the OPC protected by DLC film were improved. These results show DLC is a suitable protective film for OPC. Key words: Diamond-like carbon film, electrophotographic properties, hardness, organic photoconductor INTRODUCTION Compared with the amorphous selenium and silicon used in xerography, organic photoconductors (OPCs) are relatively soft and easily deformed.I Mechanical wear and tear abrasion is one of the main limitations on the operating lifetime of organic photoconductors.2 One of the methods oflengthening the operating lifetime of an OPC is to harden the surface. The deposition of a protective film on the OPC surface is one way to achieve such hardening. The protective layer must be hard, resistant to wear, transparent in the visible spectrum and have high electrical resistivity. An AIN protective film for OPC has been demonstrated,3 but the surface hardness is not very high. Diamond-like carbon (DLC) film should be a suitable protective material since it is both very hard and a transparent dielectric.4-6DLC films can be prepared by different techniques, including sputtering, laser ablation, and chemical vapor deposition (CVD).7 Electron cyclotron resonance (ECR)-microwave plasma chemical vapor deposition (MPCVD) can