三维集成光分束器研究及进展.pdfVIP

( 1. , 310027; 2. , 518060 ) PROGRESS IN THREE-DIMENSIONAL INTEGRATED OPTICAL BEAM SPLITTERS JIANG XiaoQing 1, SUN YiLing 1, 2Yang Jianyi, Li Xihua, Zhou Qiang, WANG MingHua1 1 Dept. of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027 2 College of Engineering and Technology, Shenzhen University, Shenzhen 518060 Abstract: This paper presents an overview of three-dimensional integrated optical beam splitters based on different technological schemes. The possibility of adding the third dimension to conventional two-dimensional optical beam splitters would greatly increase the integrated density and would overcome some of the input-output problems while preserving the reliability and structural stability of two-dimensional integrated optics.An experimental realization of a three-dimensional integrated optical power splitter based on multimode interference is also described. Adding a new dimension to the conventional MMI optical splitters enables the outputs to be set in both the horizontal and vertical directions. We also discuss how this three-dimensional integrated optical beam splitters apply to three-dimensional integrated circuit. Keywords: integrated optics, three dimension, optical beam splitter, multimode-interference coupler Y MMI