三坐标测量机综述.docVIP

三坐标测量机综述 何旭栋 （上海大学 学院，上海200072）Summary of Coordinate Measuring Machine(CMM) HE Xu-dong (School of Mechatronic Engineering andAutomation, Shanghai University, Shanghai 200072, China) Abstract: I writed begin with the coordinate measuring machine’s structure, drive system, rails and bearings, balanced body, raster and probe. On the structural form, I introduced series and parallel institutional coordinate measuring machine, and highlighted the three degrees of freedom parallel mechanism’s structure, characteristics and working principle; On the drive system, for each types of drive system, I introduced works principle and the basic structure .Then I compared the advantages and disadvantages that drive system applications, and introduced a new bearing structure combinated gear drive system; On the bearing and rail,I introduced coordinate measuring machine working features and air-rail structure, and analysed of air-rail dynamic performance through experiment; On the balanced mechanism,I pointed out used balance and each characteristics; On the grating, I introduced the grating reading principles, installation and proposed a new type of grating material; On the probe, I described the principles of probe classification. And the error source of probe analyzed by atomic force also proposed a quasi-contact technology, which is the development trend of the probe. Finally, I introduced a the creative principle of improve the accuracy - error compensation. Respectively, thermal deformation error of the measuring machine, the error caused by the weak stiffness of the structure and dynamic error compensation technique for a brief introduction. Key words: parallel institutions; combination bearing reducer; air-rail; atomic force potential contact 1 引言 三坐标测量机CMM (Coordinate Measuring Machine)是近几十年发展起来的一种高效率的新型精密测量仪器。它是一种集机械、光学、电子、数控技术和计算机技术为一体的大型精密智能化仪器, 是现代工业检测、质量控制和制造技术中不可缺少的重要测量设备, 其技术水平是现代测量技术和制造技术水平高低的一个重要标志, 因此, 对CMM理论和技术的研究一直是国内外学术界和工业界关注的热点。它的通用性强、测量范围大、精度高、效率高、性能好、能与柔性制造系