纳米类金刚石薄膜的制备和性能研究.pdf

纳米类金刚石薄膜的制备及性能研究 李红轩徐洮陈建敏周惠娣刘惠文 (中国科学院兰州化学物理研究所固体润滑国家重点实验室，甘肃兰州730000) 摘要：利用宣流．射频-等离子体增强化学气相沉积技术在单晶硅表面制各了纳米类金刚 石薄膜。采用原子力显微镜、Ramarl光谱、红外光谱研究了薄膜的表面形貌和微观结 构，并初步考察了薄膜的摩擦学性能。结果表明，制备的薄膜具有典型的类金刚石结构 特征，该薄膜具有良好的抗磨减摩性能。 关键词：等离子增强化学气相沉积；觏米菪金刚石薄膜；摩擦学性能 ＼^。 onthe and ofNanoscale Study PreparationProperties Films Diamond-likeCarbon Li Huiwen Hongxuan，XuTao，thenJianmin，ZhouHuidi，Liu (State ofSolid InstituteofChemical Lubrication,Lanzhou Physics， KeyLaboratory ChineseAcademyofSciences，Lanzhou,730000，China) diamond-likewere onSisubstrate Abstract：Nanoscalefilms successfullydeposited by DC-RF-PECVDmethod．Thesurface and tribologicalproperties morphology,microstrucmre ofDLC were atomicforce films investigatedrespectivelyby andUMT-2MTandwear results spectroscopy,infraredspectroscopy friction testing．The showedthatthefilms DC-RF··FECVDhad diamond··likecharacteristics producedby typical and and behavior． good antiwear friction-reducing DLC Keywords：PECVD，nanofilms，确bological properties 1．引言 类金刚石(diamond—like carbon，缩写为OLC)薄膜具有高硬度、低摩擦系数、高耐 磨性以及良好的化学稳定性、导热性、电绝缘性、光透过性和生物相容性等优异性能，其作