基于波长扫描塔尔博特效应的阶高测量理论研究.pdfVIP

第 28 卷第 12 期 光学学报 Vol. 28 , No.12 文章编号， 0253-2239(2008) 12-2307-04 基于波长扫描塔尔博特效应的阶商测最理论研究 张成义李传起装世盘 (南京信息工程大学物理系，江苏南京 210044) 摘要 i丘年来，多维阶离测量问题倍受关注，两波长或波长扫描方式的增尔博特效应被应用于多维阶高测量。研 究表明，暴子蟠尔博特(丁albot)效应的阶商测量方法具有仪器结构紧凑、无需机械相捕、稳~性高利测量去范罔大等 优点。因没有光栅或检测器件的任何机械移动，可避免由此导致的相位问题及测量误袭。取代相位信息，该方法 采用衍射条纹的最大衬比度来判定塔尔博特像.测试中均采用占空比为 1:2的龙基 (Ronchj)光栅作为周期结构衍 射物，利用不同波长格尔博特像的像距来确定物体阶高。因为测景的是条纹衬比度而非绝对强度，所以阶高测量 精度依赖于条纹衬比度，最大衬比度的获取与判定是非常重要的。在分析对比的基础上指出，采用非龙基型光栅， 如.iE弦振阳光栅或相位光栅，能使成像条纹分布更合理，有效地提高成像条纹的衬比度。研究还褒明，所采用周期 结构衍射物的空间周期越小，分辨率就越南，从而给出了分辨率问衍射物空间周期的定量关系。 关键词 测霞;阶离;波长扫描 p 塔尔博特效应;分辨率 中图分类号丁N91 1. 74; 0438.2 文献标识码 A doi: 10. 3788/AO 2307 Theoretical Study of Arbitrary Step-Height Measurement ?ased on Wavelength.…Scanning Talbot Effect Zhang Chengyi Li Chuanqi Pei Shixin (Department of Physics , Nanji叩 University olInformation Science Technology. Ntα忧}i叩 ， Ji刷.gsu 210044 , China) Abstract Recently , arbitrary multi-dimensional step唰height rneasurement has attracted much attention. Two wavelength Talbot effect or wavelength-scanning Tal阳t effect is implemented for the arbitrary step-height measurement. The main advantages of the method are non-mechanical scanning. high stability because of íts common-path geometry and compactness. Wíthout any mechanical movement of the grating or the detector in the longítudinal dírection. the system is free from phase ambiguity problern and measurement errors caused by it. Instead of phase information. the maximum contrast of the high visibility bands is used to judge the occurrence of Talbot image , Ronchi grat?ng with an open ratio of O. 5 is used for the periodic structure diffraction object. step田 height measurement is given by the distance of self-irnage planes. Since the technique rneasures the fringe contrast rather than absolute intensity , accuracy of the step-height measurement depends on the fringe contrast. It is important that acquirement and judgement of the maximum contrast of the high visibility bands. It is pointed out