2011-05-24 Antares customer presentation.pdfVIP

1? 2010, Intego GmbH Version 2.0 Thomas Wagner Only for confidential use at customers Thomas Wagner Intego GmbH Henri-Dunant-Str. 8 D-91058 Erlangen +49-9131-61082-150 thomas.wagner@intego.de ANTARES Crack detection for wafers and cells 2? 2010, Intego GmbH Version 2.0 Thomas Wagner Only for confidential use at customers ANTARES Wafer Cell Inline system for contactless crack detection Inline system ? Reliable crack detection tool ? Works contactless ? Single wafers/cells are inspected on-the-fly ? For integration into existing production lines above the conveyor belt ? Optionally with bottom section and conveyor belts Inline system for integration above conveyor belts 3? 2010, Intego GmbH Version 2.0 Thomas Wagner Only for confidential use at customers ANTARES Wafer Example of a microcrack in a wafer The microcrack is clearly visible ensuring an easy and reliable automatic detection Comparison: Detail of the microcrack of the ANTARES Wafer with the conventional IR crack detection (where the crack is not so clearly visible, even for the human eye, and therefore hard to detect in an automatic evaluation) ANTARES Wafer Conventional crack detection ANTARES Wafer: Complete wafer Mikrocrack details 4? 2010, Intego GmbH Version 2.0 Thomas Wagner Only for confidential use at customers ANTARES Wafer Cell Example of cracks in a wafer and a cell Detected crack in a multicrystalline wafer (length approx. 3mm) Detected crack in a multicrystalline cell (length approx. 6mm) 5? 2010, Intego GmbH Version 2.0 Thomas Wagner Only for confidential use at customers ANTARES Wafer Cell Key features Inline Contact-free infrared microcrack inspection for wafers and cells Robust reliable Not disturbed by any grain structure or backfield metallization Quick Cycle time: 1 sec. per wafer, 2 sec. per cell 6? 2010, Intego GmbH Version 2.0 Thomas Wagner Only for confidential use at customers ANTARES Cell Example of small cracks in cells Here are some examples of smal