MEMS复眼成像系统.pdf

Vol. 4 No./ Feb. 010 基于MEMS技术的人造复眼成像系统 19 基于MEMS技术的人造复眼成像系统 An Artificial Compound Eyes Imaging System Based on MEMS Technology 邸思　林慧　杜如虚 摘 要 本文介绍了一种基于MEMS制造技术的人造复眼成像系统。该系统主要包括两大部分：用于模拟生物复眼成像机 理的微透镜阵列和用于图像采集的CMOS工业相机。作为人造复眼的9×9微透镜阵列通光刻胶热熔法制作被制作在平面玻 璃基底上，其横向尺寸为0.9cm×0.9cm，厚度不足1mm，与生物复眼尺寸接近。实验中，每一个微透镜均对目标物单独 成像，因此CMOS相机捕捉到的是物体的多重像。这与同位生物复眼的成像机理相类似。通过对多重目标像进行数字重 建，即可获得最终所需要的目标像。该系统成功模拟了生物复眼的成像机理并具有可与之相比拟的微小尺寸，具有重要的 实际应用价值。 关键词 人造复眼；微透镜阵列；图像重建 ABSTRACT This paper introduces an artificial compound eyes imaging system with planar structure based on MEMS fabrication technology. Firstly, we used the photo-resist reflow method to fabricate a 9×9 microlens array on a planar glass substrate, as the lenses of the compound eyes. Its transverse size is 0.9×0.9 cm and thickness is about 0. mm. Then we built an imaging system where object images are captured by the micro- lens array using a CMOS camera. In the experiment, the imaging system is used to view a character “A”. It is found that each microlens can image the character “A” effectively. As a result, a 9×9 multiple-image is captured in the CMOS camera. Finally, the object image is reconstructed from the multiple-image by digital process algorithm. The experimental results indicate that our system can effectively imitate the imaging mechanism of the compound eyes. KEYWORDS Artificial Compound eye; Microlens Array; Image Reconstruction 1 Introduction Different from human beings, many species in nature use their compound eyes to view. The vision systems of most insects are typically compound eyes, which have several advantages such as small in size, large filed of vision and high sensitivity to moving object [1, 2]. Therefore, many researchers have paid their attention on artificial compound eyes imaging system since 1990s [3 - 5]. Microlens array are often used to imitate compound eyes in bionics. In 2000, Tanida et al developed a compound eyes imaging system consisting of a microlens array with planar st