微摩擦论文基于光纤传感器的微摩擦-微粘着测试仪性能研究.docVIP

微摩擦论文：基于光纤传感器的微摩擦/微粘着测试仪性能研究 【中文摘要】微摩擦/微粘着测试仪是针对微观条件下摩擦及粘着现象开发的测试装置,能够有效测量微牛至毫牛范围内的摩擦力和粘着力,反映材料间的摩擦和粘着特性,为微机电系统中微摩擦磨损特性研究提供试验手段。本文在先期研制的微摩擦/微粘着测试仪的基础上,针对振动干扰影响较大和步进电机间歇运动等问题,对信号处理、步进电机控制和压电陶瓷控制等问题进行了分析和研究,采用复合滤波、闭环控制和复合加载等方法对测试仪进行改进,进一步提高了仪器的测试精度和稳定性,主要研究工作有：(1)采用铍青铜为材料制作弹性敏感元件,并进行了有限元分析和标定,优化了元件的刚度系数和输入输出线性,增强了测试仪的灵敏度。(2)对不同工况条件下的载荷及摩擦力电压信号进行时域、频域和小波分析,研究了噪声和振动干扰信号特点,采用均值滤波、滑动滤波和小波去噪组成的复合滤波方法进行处理,有效地减弱了外界振动干扰和噪声的影响。(3)分析了法向步进电机加载方式下的静态及动态加载误差,通过构建PID闭环控制系统实现闭环加载控制,减少了加载误差,提高了载荷加载精度。(4)研究了压电陶瓷的迟滞和非线性等固有特性,在前馈开环控制误差分析的基础上,对压电陶瓷采用位移闭环控制,获得了较高的位移输出精度。(5)采用步进电机和压电陶瓷实现复合加载,满足了不同加载要求,通过微摩擦力测试实验和微粘着力测试实验,验证了测试仪稳定性和可靠性。 【英文摘要】The Micro friction Micro adhesion tester is a test device developed for friction and adhesion phenomenon under the microscopic condition, which can effective measure friction force and adhesive force in the range of Micro cattle and Backhoe cattle, also can reflect the properties of friction and adhesion among the materials. And it provides testing methods to micro friction attrition properties for MEMS (micro electro mechanical system).Based on the advance development of micro friction micro adhesion tester, the paper analyzes and researches the problem of signal processing, stepping motor control and piezoelectric ceramic control, which is against to the problem of great influence of vibration and intermittent movement of stepping motor. It used methods of composite filtering、closed loop control and composite loading to improve the tester, which is able to enhance the testing accuracy and stability. The main research work is showed as follows:(1) Use beryllium bronze for material produced elastic sensitive components; Process finite-element analysis and demarcation; Optimize the stiffness coefficient and in-out linear of component; Improve sensitivity of tester.(2) Analyze the frequency domain, time domain and wavelet for test signals of micro friction under of different working conditi