Solid phase extraction flow injectionwater spectrophotometry of trace silicon in the semiconductor industry_0.docVIP

Solid phase extraction flow injectionwater spectrophotometry of trace silicon in the semiconductor industry Of: Pengyuan Zhen Zhang Min Ma Jian Yuan Dongxing [Abstract] silicate and ammonium molybdate in acidic medium molybdenum yellow reaction of silicon, silicon molybdenum reduction to molybdenum blue yellow, may be extracted quantitatively HLB cartridge. On this basis, a new flow injection solid phase extraction spectrophotometry (FI SPE Vis) determination of trace silicate in new ways. the reaction of silicon-molybdenum blue by HLB cartridge extraction, clean water to remove impurities, NaOH solution eluted by spectrophotometry. Experiments on the parameters were optimized, the optimized parameters are: concentration of eluent 0.01 mol / L; the sample on the column flow rate of 28.0 mL / min; elution rate 3.5 mL / min; reaction temperature is 45 ℃; silicon and silicon-molybdenum blue molybdenum yellow reaction times are 5 min; molybdate mixture, oxalic acid, the amount of ascorbic acid solution were 3.5,3.5 and 1.75 mL. The method has good reproducibility and sensitivity, determination of silicon 9.33 μg / L of silicate salt water sample 7, RSD is 1.8%; select a different sample enrichment time, quantitative analysis can be extended to the linear range of 0.47 ~ 117 μg / L; detection limit of 0.18 μg / L; recovery was 96.8% ~ 105%. to meet the special industrial water needs in the detection of trace amounts of silicon. [Keywords:] flow injection analysis, solid phase extraction, trace silicon, silicon-molybdenum blue 1 Introduction Industrial water in the silicon content in excess of the allowable range, will have a negative impact products, and even cause serious accidents. For example, the concentration of soluble silicon thermal power, reagent factory, semiconductor plants and other important control of water quality indicators. Semiconductor industry water limit of silicon concentration 1 μg / L following [1]. the water soluble silicon mainly