Scanningelectronmicroscopy(SEM)扫描式电子显微镜.PDF

Scanning electron microscopy (SEM) 掃描式電子顯微鏡 Introduction 1. In the SEM, the area to be examined or the microvolume to be analyzed is irradiated with a finely focused electron beam. 2. To obtain topographic images. (secondary and backscattered electrons) 3. To qualitative identification and quantitate elemental information. (characteristic x-rays) 4. Large depth of field. Introduction 陳力俊, 微電子材料與製程, 中國材料科學學會(2002) Introduction J. Goldstein, Scanning electron microscopy and X-Ray microanalysis, Kluwer Academic / Plenum Publishers, New York (2003). Introduction J. Goldstein, Scanning electron microscopy and X-Ray microanalysis, Kluwer Academic / Plenum Publishers, New York (2003). 掃描式電子顯微鏡儀器構造 場發射掃描式電子顯微鏡(FESEM) SEM之3D剖面圖 SEM主要構造示意圖 掃描式電子顯微鏡儀器構造(電子槍) Electron gun : to provide a stable beam of electrons. Three types of electrons guns are used on commercial SEMs : (1) thermionic emission gun: tungsten, LaB6 −E 2 W Jc : current density (A/cm ) 2 A 2 2 J A T e kT c : constant (A/cm K ) c c T : temperature (K) E W : work function (eV) (2) field emission gun. 掃描式電子顯微鏡儀器構造(電子槍) Thermionic emission gun - Energy diagram 掃描式電子顯微鏡儀器構造(電子槍) Thermionic emission gun Tungsten hairpin electron gun (self-regulating feature of the autobiased electron gun) * Cathode: tungsten wire filament (“hairpin”) * Grid cape or wehnelt cylinder * Anode