Sensor MEMS文献Flexible and Controllable Piezo-Phototronic Pressure Mapping Sensor Matrix by ZnO NWp-Polymer LED Array.pdfVIP
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www.afm-journal.de
www.MaterialsV
R Flexible and Controllable Piezo-Phototronic Pressure
E
P
A Mapping Sensor Matrix by ZnO NW/p-Polymer LED Array
P
L
L Rongrong Bao, Chunfeng Wang, Lin Dong,* Ruomeng Yu, Kun Zhao, Zhong Lin Wang,*
U
F and Caofeng Pan*
requirements of artifi cial skins whose
A functional tactile sensing device is essential for next-generation robotics spatial resolution is near 50 µm. Our
and human–machine interfaces technologies, since the emulation of touching group has demonstrated pressure sensor
requires large-scale pressure sensor arrays with distinguishable spatial-res- array base on piezotronic[ 3 ] and piezo-
olution, high sensitivity, and fast response. Here, a fl exible LED array com- phototronic effects.[ 4 ] A spatial resolution
of 120 µm was achieved for piezotronic
posed of PEDOT:PSS and patterned ZnO NWs with a spatial resolution of [ 5 ]
pressure sensor array, and an ultrahigh
7 µm for mapping of spatial pressure distributions is designed and fabricated. resolution of 2.7 µm was derived from a
The
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