Microhole drilling and cutting using （微孔钻井和切割使用）.pdfVIP

Micro-hole drilling and cutting using femtosecond fiber laser Huan Huang Lih-Mei Yang Jian Liu Optical Engineering 53(5), 051513 (May 2014) Micro-hole drilling and cutting using femtosecond fiber laser Huan Huang,* Lih-Mei Yang, and Jian Liu PolarOnyx, Inc., 2526 Qume Drive, Suite 17 18, San Jose, California 95131 Abstract. Micro-hole drilling and cutting in ambient air are presented by using a femtosecond fiber laser. At first, the micro-hole drilling was investigated in both transparent (glasses) and nontransparent (metals and tissues) materials. The shape and morphology of the holes were characterized and evaluated with optical and scanning electron microscopy. Debris-free micro-holes with good roundness and no thermal damage were demonstrated with the aspect ratio of 8 ∶1. Micro-hole drilling in hard and soft tissues with no crack or collateral thermal damage is also demonstrated. Then, trench micromachining and cutting were studied for different materials and the effect of the laser parameters on the trench properties was investigated. Straight and clean trench edges were obtained with no thermal damage. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI. [DOI: 10.1117/1.OE .53.5.051513] Keywords: femtosecond laser; fiber laser; drilling; micro-hole; cutting; micromachining. Paper 131230SS received Aug. 13, 2013; revised manuscript received Dec. 19, 2013; accepted for publication Jan. 10, 2014; pub- lished online Feb. 13, 2014. 1 Introduction cutting lie in the low heat