a flexible flow sensor system and its characteristics for fluid mechanics measurements一个灵活的流量传感器进行流体力学测量系统及其特征.pdfVIP

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a flexible flow sensor system and its characteristics for fluid mechanics measurements一个灵活的流量传感器进行流体力学测量系统及其特征.pdf

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a flexible flow sensor system and its characteristics for fluid mechanics measurements一个灵活的流量传感器进行流体力学测量系统及其特征

Sensors 2009, 9, 9533-9543; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements Peng Liu, Rong Zhu * and Ruiyi Que State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China; E-Mails: liupeng07@ (P.L.); katykob@163.com (R.Q.) * Author to whom correspondence should be addressed; E-Mail: rong_zhu@263.net; Tel.: +86-10 Fax: 86-10 Received: 18 September 2009; in revised form: 29 October 2009 / Accepted: 15 November 2009 / Published: 27 November 2009 Abstract: In this paper, we present a novel micromachined hot-film flow sensor system realized by a technique using a film depositing processes and incorporating a standard printed circuit. Sensor electrodes and electronic circuits are preprinted on a flexible substrate of polyimide (PI), i.e., a flexible printed circuit board (FPCB). The sensing element, which is made of Cr/Ni/Pt with a temperature coefficient of resistance around 2,000 ppm/K, is fabricated on the FPCB by either magnetron sputtering technology or pulsed laser deposition (PLD). The sensor can be packed efficiently at high-density and integrated with signal processing circuits without additional pads. A simple fa