MEMS 教程 lecture12.pdfVIP

Optical MEMS Some optical MEMS physics and devices Introduction to MEMS lecture #12 Mark Bachman, UCI, Fall 2004 1 Overview of light Light refers to electromagnetic radiation Above a millimeter, light is known as microwaves. From: Light Measurement Handbook, by Alex Ryer. Published by International Light, Inc 2 Overview of light Common ranges of light Ultraviolet regime 3 Overview of light Common ranges of light Infrared regime Detectors such as InGaAs offer excellent responsivity from 850 to 1700 nm. Typical silicon photodiodes are not sensitive above 1100 nm 4 Overview of light Common ranges of light Visible regime Narrow range from 400 nm to 700 nm. 5 Light perception Human eye and visible light The lumen (lm) is the photometric equivalent of the watt, weighted to match the eye response of the “standard observer”. Yellowish-green light receives the greatest weight because it stimulates the eye more than blue or red light of equal radiometric power: 1 watt at 555 nm = 683.0 lumens To put this into perspective: the human eye can detect a flux of about 10 photons per second at a wavelength of 555 nm; this corresponds to a radiant power of 3.58 x 10-18 W (or J s-1). Similarly, the eye can detect a minimum flux of 214 and 126 photons per second at 450 and 650 nm, respectively. What humans see and machines see are different. 6 Optical systems Transmission of common optical