the investigation of a shape memory alloy micro-damper for mems applications调查的形状记忆合金micro-damper mems应用程序.pdfVIP

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the investigation of a shape memory alloy micro-damper for mems applications调查的形状记忆合金micro-damper mems应用程序

Sensors 2007, 7, 1887-1900 sensors ISSN 1424-8220 © 2007 by MDPI /sensors Full Research Paper The Investigation of a Shape Memory Alloy Micro-Damper for MEMS Applications Qiang Pan and Chongdu Cho * Department of Mechanic

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