基于静态呼吸图技术的图案化方法-Core.PDF

物理化学学报(Wuli Huaxue Xuebao) April Acta Phys. -Chim. Sin., 2010, 26(4) ：1135-1142 1135 [Review] 基于静态呼吸图技术的图案化方法 李 磊* 钟雅文 陈财康 李 剑 (厦门大学材料学院, 福建厦门 361005) 摘要： 对呼吸图技术制备二维有序多孔结构的研究进展进行了综合评述, 并重点介绍了本课题组发展的静态 呼吸图技术. 利用静态呼吸图法, 可制备高度有序的聚合物、聚合物/无机物微孔膜. 这些有序的结构可以直接应 用于光掩膜. 进一步, 多孔聚合物膜可以被紫外光交联和改性. 表面改性的多孔聚合物膜可以用于细胞支架. 而 交联的聚合物/无机物前驱体微孔膜可以用来制备无机纳米材料阵列. 结果表明, 静态呼吸图技术是一种简单、 高效的对聚合物、聚合物/无机物薄膜进行图案化的通用方法, 并展示了图案化薄膜广阔的功能化前景. 关键词： 静态呼吸图; 嵌段聚合物; 图案化 中图分类号： O647 A Novel Path to Patterning Based on the Static Breath Figure Technique LI Lei* ZHONG Ya-Wen CHEN Cai-Kang LI Jian (College of Materials, Xiamen University, Xiamen 361005, Fujian Province, P. R. China) Abstract ： The breath figure technique is one of the most promising strategies for the fabrication of large-sized patterns containing an ordered two-dimensional array of holes. In this review, particular emphasis is placed on the static breath figure technique, which is a robust methodology suitable for various polymers including linear polystyrene (PS), amphiphilic diblock copolymers and polymer/inorganic precursor hybrid films. The resultant highly ordered microporous polymer films can be used as a mask for lithography. Moreover, the microporous polymer films can be surface modified and cross-linked by UV irradiation. The surface modified films can potentially be applied as a cell scaffold and the cross-linked polymer/hybrid films can be used as templates for the growth of nanomaterial arrays. Key Word