[工学]北航材料微结构及测试课件-a18.pdf

Scanning Electron Microscopy 1930 (TEM) 1935 Knoll (SEM)(STEM, 100mm ) 1938 Von Ardenne SEM-- 50 mm 1942Zworykin. Hillier, - - 50 nm - : , , : SEM ! 1948C.W. Oatley, SEM Ardenne(TEM) SEM 1942, ZworkinSEM . 1965SEM. SEM1942 50nm 0.5nm. SEM , X- , ,, First Modern SEM constructed by D. McMullan in the Cambridge University Engineering Laboratory in 1951. Source: Electron Optics and Electron Microscopy, P.W. Hawkes. Electron Gun Vacuum pumps The first commercial scanning electron microscope High Resolution Field Emission SEM n now a oo ns e e SEM…. SEM-Scanning Electron Microscope (or microscopy) TEM- Transmission Electron Microscope AEM- Analytical Electron Microscope STEM- Scanning Transmission Electron Microscope EPMA-Electron Probe MicroAnalyzer SPM-Scanned Probe Microscope (STM, AFM) To see a VIRTUAL SEM, go to the following link: /primer/java/electronmicroscopy/magnify1/index.htm SEM images have a natural 3D look SEM images have a natural 3D look A simple SEM image-what is it? SEM SEM SEM Vacuum Vacuum • Why?Electron Mean Free Path requires at least 10- 3 Torr • Electron source life • W filament ≥ 10-4 Torr • LaB6 filament ≥ 10-7 Torr • Field Emission ≥ 10-10 Torr How do we achieve a good vacuum? • Mechanical roughing pump backing a diffusion pump • Liquid nitrogen cold trap • Turbo molecular pump • Ion getter pump **Note: Vacuum most Electron Gun • Filament • Filament