AZ31镁合金磁控溅射镀铝膜的性能研究.pdfVIP

　　　　　　　　LAFT 轻 　合 　金 　加 　工 　技 　术 2007 , Vol . 35 , №5 32 AZ31 镁合金磁控溅射镀铝膜的性能研究 王振林 ,杨 　惠 (重庆工学院 材料科学与工程学院 ,重庆 400050) 摘要 :采用超真空磁控溅射镀膜设备在 AZ31 镁合金表面进行了铝保护膜的镀覆 ,利用辉光放电光谱分析和纳米压 痕划痕试验技术 ,研究了镀层的成分和显微力学性能随薄膜深度的分布 。结果表明 ,铝镀层在镁合金基体表面形 成 ,镀层和基体之间存在混融的过渡层 ,铝镀层的表面硬度 、弹性模量等高于镁合金基体的 ,并随深度增加而递减 , 膜层与基体结合良好并表现出一定塑性 ,镀铝膜有利于镁合金表面防护层的形成 。 关键词 :磁控溅射 ;镁合金 ;镀铝膜 ;防护层 ( ) 中图分类号 :TG14622 ;TG174 . 442 　　文献标识码 :A 　　文章编号 :1007 - 7235 2007 05 - 0032 - 03 Characterization study of Al magnetron sputtering coating on AZ31 magnesium alloy WAN G ZhenLin ,YAN G Hui ( School of Materials Science and Engineering , Chongqing Institute of Technology , Chongqing 400050 , China) Abstract : Al protective coating was deposited on AZ31 magnesium alloy utilizing super vacuum magnetron sputtering unit . Investi gations on composition profile and micromechanical performances of the resultant coating were carried out by glowing discharge spec trometric analysis and nanoindentationscratch test respectively. The results shows that Al coating formed on the surface of magne sium alloy substrate with a intermediate layer between them , the coating has a elevated surface hardness , elastic modulus which de creased with depths increased , additionally it was adhered well to the substrate being characterized by somewhat elastoplastic proper ty. The Al coating is expected to be contributed to the formation of protective film on magnesium alloy. Key words : magnetron sputtering ;magnesium alloy ;aluminum coating ;protective film 　　镁合金在腐蚀性环境中 ,不能像铝合金那样在 以提高合金的防蚀