用于wdm系统的集成解复用接收技术的研究-电磁场与微波技术专业论文.docx

北京邮电大学硕士研究生学位论文摘要拟的方法对这种新型并行探测集成解复用接收器的解复用性能和串扰特性进行了计算，并作了分析，分析表明此结构的集成解复用接收器有较好的解复用性能，有望用于WDM系统中。3、为了实现阶梯腔结构的并行探测集成解复用接收器，用湿法腐蚀在同一个GaAs基片上得到了四个不同厚度的阶梯结构，用显微镜观察了制备的阶梯结构GaAs基片，记录下了表面显微图和横截面显微图j测量出了阶梯相差的厚度，并计算出了H：SO。：H。O。：H。0=1：1：30腐蚀GaAs基片的腐蚀速率大约是1．985nm／s。为最终成功实现可控的阶梯腔的实验制备，积累了实验经验和实验数据。4、为了改进一镜斜置三镜腔结构，增加光在吸收腔中的反射次数，使得光得到更充分的吸收，研究了弧形悬臂的制作。用选择性腐蚀方法在InP基片上制作出了弧形悬臂，并对不同悬臂尺寸作了扫描电镜测量，悬臂尺寸不同的时候，得到了不同角度的弧形悬臂。关键词：波分复用集成解复用接收谐振腔增强型光探测器分布布喇格反射镜楔形F_P腔弧形悬臂Ⅱ北京邮电大学硕士研究生学位论文RESEARCHONTHEINTEGRATED DEMULITIPLEⅪNGANDRECEIVINGTECHNOLOGYOFWDMSYSTEMSABSTRACTTheresearchworkinthis thesisWaSsupportedbygrantsfromoneofthesub·projectsofNationalBasicResearchProgramofChina(National“973”ProgramNo．2003CB314901，ProLRenXiao-minasChiefScientist)，NewCenturyExcellentTalentsattheUniversityofChina(NCET-05—0111)andNationalHighTechnologyRD Project(National“863”ProjectNo．2007AA032418)．Recently,theincreasingdemandforbandwidthoftelecommunicationhasgreatlypromotedthedevelopmentofopticalfibercommunications．Oneofthepromisingtechnologiesiswavelength-divisionmultiplex(WDM)thathasbeendevelopedrapidlyinthelonghaulcommunications．Wavelength-selectivereceivinghasbecomethekeytechnologyofWDMapplications．Thestructure ofcurrentdemultiplexingreceiverisbasically“demultiplexer+photodetectoranditsperformanceisnotquitewell，suchashighcost，over-sizeandadditionalinsertionlossetc．Incomparison，theintegratedoptoelectronicdevicescallintegrateseveraldifferentoptoelectroniccomponents；theycanachievemorefunctionsthanthedeviceswhicharebasedonthecombinationofseparatecomponents．Atthesanletime，duetoamorecompactstructure，weakopticalandelectricalconnectionsloss，opticalandelectricalproperties，theintegratedoptoelectronicdevicesaremoreadvantagesonstability,andreliability,andgreatlyreducethecostofthedevicepackage．Resonant-cavity-enhanced(RCE)photodetectorsisakindofinnovativeverticalcavitystructure，whichintegratsdemultiplexingandreceivingfunctionsinone，withplacingaPINphotodetectorinFabry—Perot0-P)cavity．RCEphotodetectorsdecouplesthequantumefficien