1-S0925838817316201_via%3Dihub-外文参考资料.pdfVIP

Accepted Manuscript Effect of the filament discharge current on the microstructure and performance of plasma-enhanced magnetron sputtered TiN coatings Xin Zhang, Yan-Wen Zhou, Jian-Bo Gao, Zhi-Wei Zhao, Yuan-Yuan Guo, Zhi-Wen Xie, Peter Kelly PII: S0925-8388(17)31620-1 DOI: 10.1016/j.jallcom.2017.05.037 Reference: JALCOM 41767 To appear in: Journal of Alloys and Compounds Received Date: 21 February 2017 Revised Date: 27 April 2017 Accepted Date: 4 May 2017 Please cite this article as: X. Zhang, Y.-W. Zhou, J.-B. Gao, Z.-W. Zhao, Y.-Y. Guo