截断半径对铜奈米薄膜压缩之影响研究.PDF

德霖學報「第二十四期」 民國 99 年 8月 截斷半徑對銅奈米薄膜壓縮之影響研究 截斷半徑對銅奈米薄膜壓縮之影響研究 林有鎰* 吳邦彥 ** 李建德** *德霖技術學院機械工程系教授 **德霖技術學院機械工程系助理教授 摘要 本文建立銅奈米薄膜壓縮實驗之分子動力學模式，探討截斷半徑對銅奈米薄膜承受比例壓縮 的影響，其中薄膜尺寸為 14a0 ×6a0 ×6a0 ，a0 為晶格常數，原子總數為 2016 個，壓縮速率為 -0.000002/步，系統溫度為 293K 。首先求出五種不同截斷半徑 ( rc =2.5 、2.75 、3.0 、3.25 、3.5)條件 下，自由移動區各原子位移和等效應變，其次代入原子級應力公式求出壓縮模擬的等效應力，最後 繪出流變應力 -應變曲線。結果顯示當 rc愈大時，壓應力 壓應變曲線斜率愈小。- 關鍵字：分子動力學、銅奈米薄膜、比例壓縮、截斷半徑 Study on Effect of Truncated Radius to Copper Nano-Scale Film under Compression Yeou-Yih Lin* Bang-Yenn Wu** Chien-Te Li** De Lin Institute of Technology, Department of Mechanical Engineering * Professor **Assistant Professor Abstract In this paper, the simulation model of molecular dynamics for copper nano thin film under compression was established to investigate the effect of truncated radii. The atom size is 14a0 ×6a0 ×6a0 , and total 2016 atoms in the whole structure were used. First, the atomic displacement and equivalent strain in the free motion zone at five different truncated radii( rc =2.5 、2.75 、3.0 、3.25 、3.5) was found at -0.000002/step compressive rate and 293K system temperature . Then, equivalent stress could be calculated by using atomistic stress formula. Finally, flow stress-strain curve of copper nano thin film was plotted according to the stress-strain relationship. The result showed that the truncated radius is larger, the smaller the slope of stress-strain curve. Keywords: molecular dynamics, copper nano thin film, proportiona