反磁悬浮微马达研究-微电子学与固体电子学专业论文.docx

浮实验：测量了转子的悬浮高度，通过悬浮稳定性实验验证了转子的悬浮稳定性；（2） 旋转驱动实验：测试了开环驱动作用下转子转速。 关键字：MEMS 、微马达、反磁、悬浮、微加工工艺 Research of Related Technology of Diamagnetic Micromotor Abstract Based on MEMS technology, microgyroscopes have many advantages such as small size, light weight, low price, long life and ease of mass production,by which it is expected to partially replace the traditional gyros. However, it is generally constrained by the reality of low accuracy in the high-end fields. As the limit of manufacture and detection circuit, there is a great gap in the field of accuracy between domestic microgyroscope and foreign ones. Meanwhile, with the wide use of MEMS technology in the field of a micromechanical gyroscope, a novel micromachined gyroscope with an electrostatically suspended rotor is being studied deeply at home and abroad. Employing gyroscopic effect of the high speed rotational rotor, a micromachined electrostatically suspended gyroscope can detect the angular rate and the linear acceleration of the carrier. By means of the differential capacitance of the microgyro, the angular rate and acceleration of the carrier are then transferred into the capacitive alteration related, furthermore, into electrical output. Comparing with other inertial device, diamagnetic levitation micro device with free rotor can cancel the effect of contact friction, which exist in majority micro inertial device whose proof mass is connect with substrate by flexible beams, has the ability to be used as high resolution micro inertial device. The diamagnetic levitation, which consists of diamagnetic material and permanent magnet, has the advantage of working under room temperature, noenergy input, self stable levitation and suitable scale down effect for MEMS (Micro Electro Mechanical Systems) device. According to the principle, the diamagnetic levitation can be divided into diamagneticrotor levitation and diamagnetic stable permanent magnet rotor levitation. The dissertation work discussed here