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电子光学入门
13
() 196-8558 3-1-2
kato@jeol.co.jp
2009 4 12
TEMSEMSTEM
Introduction to Electron Optics
for the Study of Energy Analyzing Systems (13)
M. Kato
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558.
kato@jeol.co.jp
(Received: April 12, 2009)
This final chapter describes several aspects of electron optics and its application to electon spec-
troscopy. An energy-filtering imaging system is presented in the first section. Such a system is
realized by incorporating an energy analyzer in a conventional electron microscope, but some crucial
optical conditions are required as compared with those in a spectrometer or microscope. Next theme
is the equivalence of the optical systems of TEM, SEM, and STEM, which is shown by the theorem
of reciprocity. The last section introduces several techniques of numerical calculation for the design
of electron optical systems.
X
13
13.1
13.2 13.3
TEM
SEM
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