介质表面态对介质阻挡放电等离子体参数的影响研究-电气工程专业论文.docxVIP

西安理 西安理工大学工程硕士专业学位论文 II II Abstra Abstract Title: research on the impact of dielectric surface states on DBD plasma parameters Major: Electrical Engineering Author: AnBang Li Signature: Supervisor: Prof. Deyi Wang Signature: Supervisor: Prof. of Eng. jianhui He Signature: Abstract Dielectric barrier discharge is widely used because of its can produce large area distribution low temperature plasma economic, flexible and convenient. However,the guiding theory of produce a characteristic distribution of plasma DBD not been established. Factors affecting plasma characteristics nor format of a unified and comprehensive understanding. In this paper, the effective on atmospheric pressure repetitively pulsed DBD plasma parameters of the applied voltage, power frequency, gas flow rate and gas composition was analysed by optical emission spectroscopy, and the impact of dielectric surface state include surface toughness and conductivity. Microscopic plasma parameters were calculated, including electronic excitation temperature and molecular vibrational temperature by emission spectrometry. Using the Boltzmann slope of the curve fitting the electronic excitation temperature of argon atoms in repetitive pulses at atmospheric pressure of Dielectric Barrier Discharge. Focuses on the relationship between the intensity of the emission spectrum of the major lines and electronic excitation temperature and applied voltage, power frequency, gas flow rate and gas composition. It was found that with the increase of the applied voltage electron excitation temperature dropped down then up again, first decline after rising with the power frequency, the rising phase of the excitation temperature higher than the decline stage. The effect of the gas flow rate on electronic excitation temperature increased first and declined. The gas composition has a greater impact on the excitation temperature. The influence on plasma parameters of dielectric surface states researched in this paper mainly focu