介质阻挡放电氩等离子体的光谱诊断研究-等离子体物理专业论文.docxVIP

介质阻挡放电氩等离子体的光谱诊断研究Spectroscopy 介质阻挡放电氩等离子体的光谱诊断研究 Spectroscopy diagnosis of argon dielectric barrier discharge plasmas Abstract Ar dielectric barrier discharge plasma at low pressure was diagnosed by the optical emission(OES)and tunable diode-laser absorption spectroscopy(TDLAS)technology in this article．The variation trend of electron temperature with voltage，pressure，gas flow and N2 concentration Was studied by DES technology．At the same time，a simple DES method called branching fraction(BF)Was introduced to measure the density of Ar metastable state and compared to TDLAS in latter chapter．Furthermore，the density of Ar metastable state and gas temperature in DBD Ar plasma were measured using the tunable diode．1aser absorption spectroscopy technology，and we also investigated their dependences on voltage，pressure，gas flow，electrode distance and N2 concentration．Following conclusions we got： 1)Based on Fermi-dirac model(F-M)and Corona model，we calculated the electron temperature and studied its trend with changing discharge conditions．Electron temperature increased with the increasing voltage and N2 concentration，but when the pressure and gas flow were increasing．it decreased．Both the variation trends of the two models were consistent，while the value calculated by F-M model Was always bigger than that by Corona model at the same experiment condition． 2)The variation trends of densities of Ar metastable state l s5。1 S3 calculated in DES-BF and TDLAS were similar，the value of 1 s5 density both in the two methods Was approximate， but the value of l s3 density in DES was just about half of that in TDLAS technology． 3)rnle density of Ar metastable state 1 s5，1 s3 and gas temperature were diagnosed by TDLAS．It Was found that，when the voltage and gas flow increasing，both temperature and densities of l s5，l s3 shown the similar lrends，which increasing rapidly at first and then slowly． In addition，the variation with gas flow was smaller than that with gas flow．With pressure i