基于DLP应用的光刻物镜设计与微型投影机光学系统研究-电子科学与技术专业论文.docxVIP

广东工业大学硕士学位论文关键词：DLP：数字光刻；微型投影机；光学设计；投影物镜 广东工业大学硕士学位论文 关键词：DLP：数字光刻；微型投影机；光学设计；投影物镜 H 万方数据 AbstractAbstract Abstract Abstract With the development of information technology and arrival of digital era， DLP(Digital Light Processing)technology as the world’S leading digital proj ection display technology,in addition to be widely used in familiar including the application scenarios of digital cinema，business，education，and home theater,now it has also infiltrated the industrial，personal consumer electronics products，medical，automotive，and many other fields．In recent years，applying the DLP technology in PCB lithography field gets high attention by people．AlthOugh the traditional PCB lithography has been developed very maturely,no matter in the aspect of efficiency,COSt，accuracy,or environmental protection， it has not been able to keep pace with the times，whereas，on the basis of the traditional lithography,DLP-based lithography is added into the digital modemization this factor precisely,making．PCB l ithography keep up with the rhythm of the times again．For this reason，specific to fabrication of the high precision PCB，the research and development of DLP digital lithography system appears particularly important at present．Furthermore，in the field of projection display,with people’S increasing demand for movability and portability of projection display device，large and heavy volume of traditional projector could not satisfy the use of this kind of portable scene at all，therefore，as DLP—based micro-projector become a hot spot of proj ection market at this moment，specific research for it also appears much more practical and has market value． For the DLP digital lithography,a ten-lenses projection objective for DMD of model O．7XGA‘by using Zemax optical design software was designed．On the basis of non—symmetrical structure，the projection obj ective has a improved air-spaced triplet as front group’and a petzval objective with flat field lens as back group．After image evaluation f