金属膨胀式真空自动校准系统-高电压与绝缘技术专业论文.docxVIP

上海交通大学硕士学位论文金属膨胀式真空自动校准系统 上海交通大学硕士学位论文 金属膨胀式真空自动校准系统 摘要 真空技术是一门应用广泛的基础学科，尤其在电力领域，真空技术 的应用覆盖了从发电、输变电、到用电设备加工制造等各个方面。在某 些应用领域，真空测量的准确度关系到真空产品的质量及运行性能，从 而对真空校准的范围及精度提出了更高的要求。 目前真空校准领域的现状是自动化程度不高，国内还未出现真空自 动校准系统，国际上也很少。随着计算机技术的发展及各种电动控制工 具的出现实现真空校准的自动化不仅可行而且非常必要了。 本文结合上海计量测试技术研究院的“低真空校准装置的改造”项 目，开发了一套金属膨胀式真空自动校准系统。膨胀法校准具有制作简 单、操作方便、校准效率高的特点，并且在低真空领域具有较高的校准 精度。 本文设计了多级膨胀结构以拓宽膨胀法在高真空区的校准范围，介 绍了前级压力和气室体积的测量方法，讨论了影响校准精度的温度变化、 气体吸附等干扰效应，并提出了解决方案。系统采用了电气动阀门及带 计算机通讯接口的测量仪表使得自动控制成为可能。采用工控机、PLC (可编程控制器)上下位机的控制方式实现了系统自动抽真空、膨胀校 准、数据采集与处理、检测报告编辑等功能。 关键词：真空校准，静态膨胀法，PLC，自动控制 上海交通大学硕士学位论文A 上海交通大学硕士学位论文 A AUTOMATIC METALLIC EXPANSIoN 、7rACUUM CALIBRATION SYSTEM ABSTRACT As a fundamental technology,vacuum technique has been widely applied in many fields．Especially in power industry,the vacuum technique is used in the power generation，power transmission，power transIbrmation，and the manufacture of electric facilities．In some applications．the accuracy of the vacuum measurement is essential for the quality and performance of vacuum products．So the wider scope and the more accuracy are required． Now the existing problem of vacuum calibration is that the automatic level is very low．There is no automatic vacuum calibration sy’stem in China． and there are few such systems in the world．With the development of computer science and the emergonce ofnew automatic tools。it is SO necessary tIlat we should realize the automation ofvacuum calibration． Combined with“The modification of low vacuum calibration system”． the project of Shanefiai Institute ofMeasurement and Testing Technology,The development of all automatic static expansion vacuum calibration system is introduced in this Papor．The expansion measurement has a lot of advantages， such as simple fabrication，convenient operation，high calibration efficiency, and so on．In addition．it has high calibration accuracy in the lOW vacuum field． In order to widen the calibration scope of expansion measurement，the design of the multistage expansion structur