金属平板和光栅结构理论分析-机械电子工程专业论文.docxVIP

国防科学技术大学研究生院硕士学位论文 国防科学技术大学研究生院硕士学位论文 第 第 i 页 摘 要 利用表面等离激元，金属纳米结构具有在纳米尺度范围内局域和控制光的优 良特性，在光电器件小型化、集成化等领域具有广阔的应用前景。本文从理论上 研究了金属平板和光栅结构的本征模式特性，提出了一种结合金属和介质光栅增 强薄膜太阳能电池光吸收效率的结构。 本文主要工作如下： 1、研究了 IMI 和 IMIMI 两类金属/介质平板波导的本征模式特性，计算了两 类波导的色散曲线和本征电磁场分布。结果显示，IMI 波导的长程等离激元波导模 式通常存在于金属层厚度小于 60 nm 时，且随着金属层厚度的减少该模式电场分布 面积变大。IMIMI 波导一般存在四类等离激元模式，在其透反射谱中存在泄露模 共振引起的增强峰。 2、研究了多层金属平板光栅的本征模式特性，尤其是电场被局域在金属条间 介质层的本征模式与光栅结构参数之间的关系。 3、针对金属平板光栅结构在薄膜太阳能电池上的应用，分析了 6 种不同结构 增强薄膜太阳能电池光吸收效率的机理。提出了一种结合硅光栅和金属平板光栅 增强太阳能电池吸收效率的新结构，数值模拟表明该结构能有效提高薄膜太阳能 电池的短路电流。 关键词： 表面等离激元；金属平板波导；金属光栅；薄膜太阳能电池 第 第 ii 页 ABSTRACT Based on surface plasmons, metal structures possess wide application prospects in the fields of sub-wavelength optics and photonic integrated circuits, because of its ability of confining and controlling light at the nanoscale. In this thesis, we theoretically investigated the eigenmodes of one dimensional metal slab and grating, and proposed a new way to improve the light absorption of thin-film soler cell based on the metal slab and grating structures. The main works of this thesis are as follows: Studied the eigenmode characteristics of insulator-metal-insulator (IMI) waveguide and insulator-metal-insulator-metal-insulator (IMIMI) waveguide. The dispersion relations and electric field distribution of these modes are presented. Long-range SPP mode of IMI waveguides only exists at the thickness of the metal below 60nm, and the mode size increases as the metal thickness decreases. Four surface plasmons modes exist in the IMIMI waveguide when the refractive index of the three insulators is uniform.Transmission peaks are observed at the transmission spectrum of IMIMI waveguide because of leaky mode resonance. Studied the eigenmode characteristics of multilayer metal slab and grating structure. The relationships between the structure parameters and the eignmodes with the electric field localized between the metal stripes are analyzed. Studied the application of metal slab and grating structure on