三自由度机械手论文：太阳能硅移送用三自由度机械手的研究.docVIP

三自由度机械手论文：太阳能硅片移送用三自由度机械手的研究 【中文摘要】工业机器人正在逐步取代人工完成某些复杂工作,硅片制造业对环境洁净度要求极高,为了提高精度及效率,大量采用机器人来代替人工完成加工、搬运等工作。本课题以太阳能硅片移送用三自由度机械手为研究核心,开发出一种基于笛卡尔直角坐标系的专门用于太阳能硅片自动搬运的高精度机械手,该机械手定位精度高,控制简单,可取代人工搬运方式,实现太阳能硅片生产的局部自动化。本文首先探讨机械手的机械结构,分析了各种坐标形式的机械手结构,最终选定了直角坐标形式。机械手采用滚珠丝杠副实现三个方向的运动,并根据该机械手的性能要求及特点,确定开环控制方式,采用步进电动机作为机械手的驱动元件,PLC作为控制核心,由此确定了硅片移送机械手的整体结构与控制系统。针对硅片移送快速的性能要求,本文对机械手进行了时间最优轨迹规划,使机械手完成搬运的时间最短。然后根据时间最优轨迹路进行了插补运算,采用直线插补与圆弧插补两种方法,并且根据步进电动机特点提出具体执行方式。在太阳能硅片移送机械手软件程序开发时,采用顺序设计方法编写梯形图程序,并对PLC内部存储空间进行合理分配。最后完成了该机械手的组装与调试,通过不同试验验证了机械手的性能。分析了重力作用下形变对于机械手误差及定位精度的影响,采用脉冲补偿法进行补偿,补偿后减少了机械手的误差。 【英文摘要】Industrial robots are gradually replacing the manual to complete somecomplex work，wafer manufacturing requires a high degree of environmentalcleanliness．In order to improve accuracy and efficiency，a large number of robotsbeing used to replace the manual completion of processing，handling and otherwork．This paper takes the solar wafer transfer robot with three degrees of freedomas the research core，developed a specialized solar wafers for high-precision automatic handling robot based on Descartes Cartesian coordinate system．Thismanipulator has high positioning accuracy，simple control，and can replaceartificially handling methods to realize the local automation production of solarwafers．First，this paper discusses the mechanical structure of the manipulator，analyzes the structure of the manipulator of coordinates，and finally selected therectangular coordinate form．Robot adopts ball screw-to achieve the movement inthree directions．Open-loop control mode is determined according to theperformance requirements and features of the robot．Adopt stepper motor as amanipulator drive component，PLC as control core，then define the overall structureand control system ofthe wafer transfer robot．According to the performance requirements of wafer transferred fast，this paperconducted a time optimal robot trajectory planning to make the manipulato