激光自混合干涉式位移测量的仿真及实验-光学专业论文.docxVIP

激光宣混台手涉式位移测量的仿真及实验摘 激光宣混台手涉式位移测量的仿真及实验 摘 要 激蠢鑫瀵合予涉阉蔻源予激瓷器羚帮毙菠镶黧蔽。袋懿天餐慈蔗羧法瀵狳毙爱壤粒 币剃影响，逐澎遗开始主渤铡熙竞反馈效疵援溺鹈邋爨，飘恧影域了囊混合予涉技术。 爨混合干涉技术系统祷擎、紧凑、易壤瀛，熊决了镄绕予涉系统淹辩复杂、尺寸貔大、 敏感予准壹等阏越。近年来，这静技术g|起辩研工佟学越寒越多的燕注，本文鼯鑫漫合 予涉靛辊理及箕位移溺蚤麓嚣醣究，王佟鹣主要内容翔下： 1)辩熬滋会子涉巍歙翡橇理透嚣了理论疆鼗。懿兰镜F-P腚邂论霸半嚣舔激竞 嚣憔质得到系统的稳态条佛驰输出光频攀的求解方程，从而建立了自混合干涉躺数值模 嫠。瑟手反瓣搀懿徽袋移稽猊，建立经移数毽攘鍪，著爨攉导遗SMI经移溅璧篡簿与疆 毙窳干涉铡凝稳戴载稆谯凝被壤。 (2)遭淑数值分聿斤讨论了蠡混台干涉位移溅餐聚统煞基零将熬，包括辩簸鞠位瓣 蝓蹬光频、输爨强度、输爨鼬率、谱线爨发的影响，以及正弦波、穷波、三角波、键嵌 渡褥麓反菇传位移薅籍舞信譬熬特点。 ≤3势褫了菠续强袋瓣售号条纹澎状戆影翡，攥冢了簧号条皱方囱颡翳憋鞭强及 播弩反转的成阁。讨论了爨混合干涉系统程多模状态“F的稳定性。 (毒)秘步建立了羹溅金子涉豹实验装震，鼹蘩了窿溪金千渗琰蒙。实验孛努爨蠲 镄鹾器帮信弩发生器调制聪电陶瓷，菠察穰号霹穗真德号基本渤农。辩溺量鞠德移薰与 梅寝篷裙差较大瓣褥题遴嚣讨论。 (5)分别用Matlab驰Delphi编稳铸粪分析了黯混合干涉位移测量结果。 甍键词：蠢溅会予涉；搬获续；半喾钵激兜嚣；氆移灏堂系绫；傣粪分稽 Simulation Simulation and experimental study of displacement measurement based on self-mixing interference Abstract ne problem of self-mixing interference stems from the optical feedback effect．Initially, people always tried to eliminate the optical feedback effect。but gradually people began to make 1,kse ofit actively to measure蠢l kinds ofphysical quantities。So the technology based on self-mixing interference was brought forth．In recent years，this kind of technology has been increasingly of interest because of simplicity,compactness and easy alignment．It’S a solution lo the problems of eomplexity,large size and sensitive alignment that are typical of an conventional interferometers。{挞s thesis has studied the prineiple of self-mixing interference and the displacement measurement．The principal work is aS follows： (1)The principle of self-mixing interference effect iS studied．Laser system’S stable condition and frequency function are gained by virtue of theoretical model of a threewmirror F-P cavity and semiconductor lase≈and then the mathematical model ofcommon self-mixing interference effect iS estabfished．Especially under the condition of micro displacements of reflector,the mathematical model of displacement measurement iS established．Result8 shOW 也at the displacement S髓lsor based on self-mixi