IC工艺几种IC工艺流程.pptxVIP

IC工艺几种IC工艺流程第1页/共47页 After studying the material in this chapter, you will be able to:Draw a diagram showing how a typical wafer flows in a sub-micron CMOS IC fab. 画出典型的流程图Give an overview of the six major process areas and the sort/test area in the wafer fab. 对6种主要工艺的应用和测试有大概的认识For each of the 14 CMOS manufacturing steps, describe its primary purpose. 描述CMOS工艺14个步骤的主要目的Discuss the key process and equipment used in each CMOS manufacturing step. 能讨论每一步流程的关键工艺和设备 第2页/共47页 Major Fabrication Steps in MOS Process FlowOxidation(Field oxide)Silicon substrateSilicon dioxideoxygenPhotoresistDevelopoxidePhotoresistCoatingphotoresistMask-WaferAlignment and ExposureMaskUV lightExposed PhotoresistexposedphotoresistGSDActive Regionstop nitrideSDGsilicon nitrideNitrideDepositionContact holesSDGContactEtchIon ImplantationresistoxDGScanning ion beamSMetal Deposition and EtchdrainSDGMetal contacts PolysiliconDepositionpolysiliconSilane gasDopant gasOxidation(Gate oxide)gate oxideoxygenPhotoresistStripoxideRF PowerIonized oxygen gasOxideEtchphotoresistoxideRF Power Ionized CF4 gasPolysiliconMask and EtchRF PoweroxideIonized CCl4 gaspoly gateRF Power第3页/共47页 CMOS Process FlowOverview of Areas in a Wafer FabDiffusionPhotolithographyEtchIon ImplantThin FilmsPolish 第4页/共47页 Model of Typical Wafer Flow in a Sub-Micron CMOS IC FabTest/SortImplantDiffusionEtchPolishPhotoCompleted WaferUnpatterned WaferWafer StartThin FilmsWafer Fabrication (front-end) 第5页/共47页 Simplified Schematic of High-Temperature FurnaceGas flowcontrollerTemperaturecontrollerPressurecontrollerHeater 1Heater 2Heater 3ExhaustProcess gasQuartz tubeThree-zoneHeating ElementsTemperature-setting voltagesThermocouplemeasurements第6页/共47页 Photolithography Bay in a Sub-micron Wafer Fab第7页/共47页 Load StationVapor PrimeSoft BakeCool PlateCool PlateHard BakeTransfer StationResist CoatDevelop-RinseEdge-Bead RemovalWafer Transfer SystemWafer CassettesWafer Stepper (Alignment/Exposure System)Simplified Schematic of a Photolithography