测试岗位材料FT24000_X002_E2-UF3000.pdfVIP

FT24000-X002-E2

2003/05/14

FULLYAUTOMATICPROBER

MAINTENANCEMANUAL

TOKYOSEIMITSUCO.,LTD

TOKYO,JAPAN

DANGER

•Hazardousvoltagecancausesevereinjuryordeath.

-Onlythoseengineersthathavereceivedthemaintenancetrainingforthe

machinecanremoveexternalcoversofthemainbodyandthedisplay

unitandaccessinternalelectricalunits.

-Beforecheckingorreplacingfuses,shutdownthepowersupplyby

turningoffthemainbreaker,whichisprovidedontheloaderrearpanel.

WARNINGS

1.Chuckmovingduringprobingcancauseinjury.

-MakesureChuckstopsbeforeservicing.

2ChuckcomingforwardwithChuckheadplateandaccessdooropencan

causeinjury.

-MakesuretoturnthepoweroffbeforeworkingwithChuck.

3Headplate,ifdropped,cancauseinjurywhenclosing.

-Keephandsofffromtheundersideoftheheadplate.

4Movingarmsforthewafertransfercancauseinjury.

-Makesuretoturnoffpowerswitchbeforeworkingthewafertransfer.

5Wafercarriercandamageiftouchedduringtheloadportisoperating.

-Makesurenottotouchtheloadportwhilerunning.

6Operatingtestheadcanbedangerous.

-Makesurenottogetintothetestheadrunningarea.

7ChuckcancauseburnwhenwaferisputonortakenoutfromChuckwiththe

headplateandfrontaccessdooropen.(Heatupoptionspecification)

-DonottouchHotChuckwhenhandlingwafersbyhandoratservicing.

-HotChucktemperatureiskeptonafterthepowersupplyisturnedoff.

MakesuretheHotChuckiswellcooledbeforetouchingit.

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