基于计算全息图与随机编码混合光栅的离轴抛物面同轴干涉检测系统.pdfVIP

巧、调整灵活、自主化程度高。本课题采用两种不同重构方法，能够对离轴圆形区域口径

25.4mm、母抛物面焦距76.2mm、子抛物面反射焦距152.4mm的离轴抛物面反射镜进行高

精度干涉检测，检测结果RMS约为，与官方标称值、对照实验ZYGO干涉仪无像差

4

点法检测结果相匹配。

关键词：非球面检测；干涉检测；计算全息图；四波前横向剪切干涉；离轴抛物面；

Abstract

Thecomponentsusedintraditionalopticalsystemsaremostlycomposedofsimpleplanes

andsphericalsurfaces.Theapplicationofcomplexasphericalcomponentscanimprovethe

performanceoftheopticalsystem,butitalsorequiresahigherlevelofprocessingandinspection

technology.Anoff-axisparabolicsurfaceisanoff-axisasphericsurfacewithoutrotational

symmetry.Off-AxisParabolicMirror(OAPM)canconvergeparallellightofvariouswavelengths

inspecificdirectionstothefocalpoint.Ithasawideworkingspectrum,gooddurabilityagainst

superlasers,smallmaterialrestrictions,andhighlightenergyutilization.Ithasnodispersion,

chromaticaberration,sphericalaberration,andself-focusing,soitiswidelyusedasafocusing

anddeflectionelementinthefieldofresearchontheinteractionofultra-stronglaserpulsesand

matter.Thankstotheadvancementofopticalprocessingtechnologyundercomputercontrol,the

surfaceerrorofOAPMforprocessingbrassH75materialsusingultra-precisioncuttingtechniques

suchassingle-pointdiamondturningcanreachaquarterwavelengthoftherootmeansquare

(RMS).

Inviewofthecomplexshapeoftheoff-axisparaboloid,itisdifficulttodesignazero

compensator,andtheZYGOinterferometeristoolargeanddifficulttomoveforinterferometric

detectionofasphericsurfaces.Thistopicproposesacombinedinterferencedetectionscheme,

usingdiffractivezerocompensationcomponents——Computer-GeneratedHologram(CGH)

generatesasphericalwavesforzerocompensationonthesurfacetobemeasured,withhigher

designfre