《复杂背景下TFT_LCD表面缺陷检测系统的设计》.pdf

第 25 卷 第 12 期 电子测量与仪器学报 Vol. 25 No. 12 · 1054 · JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT 2011 年 12 月 DOI: 10.3724/SP.J.1187.2011.01054 复杂背景下 TFT-LCD 表面缺陷检测系统的设计 1 1 2 朱 光 朱学芳 张华坤 (1. 南京大学信息管理系 多媒体信息处理研究所, 南京 210093; 2. 合肥工业大学仪器科学与光电工程学院, 合肥 230009) 摘 要: 设计了背景去除算法和缺陷区域检测算法, 对复杂背景与低对比度条件下采集的 TFT-LCD 图像进行处理, 利用一 维傅里叶变换和全尺寸小波变换提取缺陷特征信息, 可以较准确地检测出缺陷区域。搭建了在线检测系统平台, 通过辅助光源 和高速线阵相机采集图像, 由图像采集卡保存至计算机中, 利用 Matlab 编写上层图像处理软件进行在线检测。实验对不同的光 照条件下的检测结果进行分析, 系统可以准确检测出 TFT-LCD 面板的表面缺陷区域, 识别率达 96%以上, 扫描时间间隔小于 80 µs, 满足系统实时性的要求。 关键词: TFT-LCD; 缺陷检测; 一维傅里叶变换; 全尺寸小波变换 中图分类号: U216.3 文献标识码: A 国家标准学科分类代码: 510.4050 Design of inspection system for TFT-LCD surface defects under complex background Zhu Guang1 Zhu Xuefang1 Zhang Huakun2 (1. Department of Information Management, Institute of Multimedia Information Processing, Nanjing University, Nanjing 210093, China; 2. The School of Instrument Science and Opt-electronic Engineering, Hefei University of Technology, Hefei 230009, China) Abstract: Background removal and flaw region detect algorithm are designed for processing the TFT-LCD images under the condition of complex background and low contrast. In this paper, one-dimensional Fourier transform and full-size characteristics of wavelet transform to extract the flaw information are used to detect the flaw region accurately. The online detect platform is built to capture the images with help of illuminants and high-speed line-scan camera, then the images are saved in computer by image acquisition card. The image-processing software is coded by Matlab. The experiment analysis f