RFMEMS开关发展现状.pdfVIP

M E M S M EM S Dev ice T echno lo gy RF MEMS 开关的发展现状 严春早, 许高斌, 叶刘晓 ( 合肥工业大学 应用物理系, 合肥 23 0009) : RF M EMS 关是其各种组件系统级应用中最基本的器件之一, 具有低损耗低功耗 线性化好尺寸小及易集成等特点对各种 关驱动机制的特点进行了比较, 指出具体驱动机制 的选取应符合实际应用的需求; 在和传统 pin 关F ET 关相比较的基础上, 总结了 RF M EM S 关的优缺点, 概述了其目前的应用领域以及面临的主要问题; 最后介绍了目前国内 外RF M EMS 关研究状况通过对国内外一些经典 RF M EM S 关范例的简述, 展望了 RF M EM S 关未来的发展趋势 : 射频微机电系统; 关; 驱动机制; 可靠性; 发展趋势 : T H 703; T M504 : A : 1671-47 76 ( 2008) 11-0 647-07 Development Status of RF MEMS Switches Y an Chunzao, Xu Gaobin , Y e L iuxiao (D ep ar tment of A p p l ied P hy sics , H ef ei University of T echnology , H ef ei 230 00 9, China ) Abstract: T he R F M EM S sw i ch is one of he basic ins rumen s in he m odule and sys em appli ca ions o f R F MEM S, and has adv an ages including low lo ss , low pow er , ex cellen linear i y, small size, easy in egra ion. By co mparing he f ea ur es of all he dr iv ing m echanism s, he conclusio n is ob ained ha he cho ice of he specif ic driving mechanism m us mee he requiremen s o f he prac ical applica ion . Com pared w i h he radi ional pin and F ET sw i ches, he R F MEM S sw i ch also has advan ag es and disadvan ag es . T he recen applica ion fields and he f acing problems of RF MEM S sw i ches are sum marized. T he researches and developmen s of RF M EM S sw i ches a hom e and abroad are in r oduced. By describing he classical RF MEM S sw i ches , he prospec and developmen rend in fu ure are analyze