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Richard S. Muller Professor in the Graduate SchoolProfessor EmeritusElectrical Engineering and Computer Sciences DepartmentFounding DirectorBerkeley Sensor Actuator Center (BSAC)Editor-in-Chief: IEEE/ASME Journal of Microelectromechanical SystemsInternet:muller at eecs dot berkeley dot eduPhone: (510) 642-0614FAX: (510) 643-6637Address:University of California, BerkeleyEECS Department401 Cory Hall #1770Berkeley, CA 94720-1770Grant Administrator:Tom Parsons(510) 643-6690tparsons at eecs dot berkeley dot eduSometimes confused with Richard A. Muller of UCB Physics Department and LBNL.BIOGRAPHYRichard S. Muller received the degree of Mechanical Engineer (with highest honor) from Stevens Institute of Technology, Hoboken, New Jersey in 1955. Supported by Howard Hughes and NSF Fellowships, he earned an MS degree in Electrical Engineering in 1957, and a doctorate in Electrical Engineering and Physics in 1962 at the California Institute of Technology, Pasadena, California. From 1955 to 1962 he was a member of the technical staff at the Hughes Aircraft Company, Culver City, California, and from 1957 to 1960, a lecturer at the University of Southern California in Los Angeles. He was also a lecturer at Caltech during 1961-62. In July, 1962 Dr.Muller joined the Electrical Engineering faculty at the University of California,Berkeley. His initial research and teaching on the physics of integrated-circuit devices led to collaboration with Dr. Theodore I. Kamins of Hewlett-Packard Laboratories in writing Device Electronics for Integrated Circuits, first published by John Wiley Sons in 1977, with a 2nd edition in 1986, and a 3rd edition appearing in 2002. This textbook has been translated into Spanish, Italian, Russian, and both orthodox and simplified Chinese. Dr. Muller changed his research focus in the late 1970s to the general area now known as microelectromechanical systems (MEMS), and he joinedin 1986 with colleague Professor Richard M. White to found