金刚石多线锯结构设计__论文.docVIP

济南大学泉城学院 毕 业 设 计 题 目 专 业 班 级 学 生 董晨雨 学 号 20073006011 指导教师 侯志坚 二〇一 一 年 月 日摘 要 我国是一个金刚石生产需求大国。金刚石在我国国民经济中占有非常重要的地位，同时金刚石也是我国机械装备的重要战略物资。特别是在硬脆材料的切割中，金刚石多线锯就显得尤其的突出。集成电路的单晶硅片的需求越来来越大，往复式自由磨料线锯加工，其材料去除机理为研磨，加工效率比较较低，且不能切割硬度更高的碳化硅晶体、陶瓷等材料。本课题提出金刚石多线锯切割这一工艺，利用固结在线锯丝上的金刚石磨粒直接磨削切除材料，减轻加工面表层损伤，环形线锯丝单向高速连续运动，大大提高切割效率和速度。可用于硅晶体切片及高硬度材料切割加工。具有切割精度高、制造成本低、对环境无污染等优点。 本课题对多线锯如何套在多个导轮上，并由张紧机构拉紧；如何采用丝杠、螺母机构驱动丝架移动；对配重机构的了解；以及对其结构的基本设计有初步的解析。希望通过本课题大家能对金刚石多线锯的结构和用途有所了解。 关键词：多线锯；切割；磨削；结构设计 ABSTRACT Our country is a diamond production requirements superpower. Diamond in Chinas national economy plays a very important role，and the diamond is also the important strategic materials of mechanical equipment. Especially in hard brittle materials, diamond cutting appear especially outstanding on Multi-line saws .The demand of silicon chips in integrated had become more and more, the Multi-line saws processing technology which is based on the grinding mechanism will be eliminated because its processing efficiency comparison is quite low, and cant cut hardness higher silicon carbide crystal, ceramic materials. This topic proposed the diamond Multi-line saws technology, using the technology of consolidation online saw silk grinding excision directly diamond grits, reduce the processing surface material damage, circular line continuous speed sawing silk one-way motion, greatly improving cutting efficiency and speed. It can be used for silicon crystal slice and high hardness material cutting processing,for its high precision, manufacturing cost cutting, low pollution to the environment, etc. This topic studied how the multi-line saws in multiple set, and tauted by tensioner institutions; How to adopt screw, nut institutions drive wire frame movement. And to understand the counterweight institutions; Do the basic design of the structure of a preliminary analysis.I Hope that thro