大口径光学薄膜透反射率测量方法地研究.pdfVIP

1500 1510 1520 1530 1540 1550 1560 1570 1580 1590 1560 nm 2.43 1.3 x 6.8 x 4.1x 3.3x 3.8 x 4.9 x 6.6x 9 x 1.26 1.82 x -4 -5 -5 -5 -5 -5 -5 -5 -5 -4 -4 R x 10 10 10 10 10 10 10 10 10 x 10 10 Ta O 0.4m/s, SiO 0.2 nm/s, 150 2 5 2 Lamda-900 4 x 10-4. 69.5o n =1.5168Rs =29.79%Rp=3.75%, g MgF =550nmRs