UMCOxideMetalCuCMPW.W.Reclaimr废水回收技术资料.pptVIP

TREATING RINSE WATERS from OXIDE, METAL and COPPER CMP PROCESSES DISCUSSION TOPICS IDENTIFY PROBLEM OUTLINE TREATMENT OPTIONS OUTLINE TREATMENT PROPOSED IDENTIFYING THE PROBLEM CONTAMINANTS TO BE REMOVED TSS abrasives TDS chemicals in slurry Inorganic ions, acids, bases COPPER Organics, oxidizers, dispersants, surfactants, chelators, organic acids UNIVERSAL APPLICABILITY ELIMINATE or MINIMIZE SEWER DISCHARGE RECYCLE MINIMIZE WASTE VOLUME OXIDE CMP TREATMENTNO CHEMICAL TREATMENTTSS REMOVAL ONLY OXIDE CMP TREATMENTNO CHEMICAL TREATMENT When Oxide process is isolated from metal processes No water recovery Ammonia can still be problem if NH4OH is in slurry Only TSS is removed Effluent can go to AWN METALS CMP TREATMENTNO CHEMICAL TREATMENTTSS REMOVAL ONLY METALS CMP TREATMENTNO CHEMICAL TREATMENT When metal slurry is isolated from Oxide processes No water recovery Only TSS is removed Effluent can go to AWN (pretreatment is required) OXIDE CMP TREATMENTWITH CHEMICAL TREATMENT OXIDE CMP TREATMENTWITH CHEMICAL TREATMENT Requires dosing of NaOH MgCl2 to remove SiO2 (co precipitation) Requires secondary reclaim process for water recovery Polyelectrolyte may be required in reaction tank if fume silica abrasive is used OXIDE METALS CMP TREATMENTWITH CHEMICAL TREATMENT OXIDE METALS CMP TREATMENTWITH CHEMICAL TREATMENT Separate equalization tanks required for collection of oxides and metals (no copper) Mixing oxides metal waste slurry uses the chemicals in slurry waste for treatment Fe from metal slurry helps to remove the SiO2 and helps reduce the TDS Mixing both slurry waste together starts the neutralization-precipitation process OXIDE METALS CMP TREATMENTWITH CHEMICAL TREATMENT If NH4OH is used in slurry Ammonia is removed down stream by ion exchange resin or membranes, depending on clients needs and process requirements TSS from slurry abrasives and flocculation from chemistry are removed by microfilter Polyelectrolyte used in thickening tank I