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半导体生产过程控制数据(SECOM SEmi COnductor Manufacturing process control data)_机器学习_科研数据集
半导体生产过程控制数据(SECOM: SEmi
COnductor Manufacturing process control data)
数据摘要:
Abstract: A complex modern semi-conductor manufacturing process
is normally under consistent surveillance via the monitoring of
signals/variables collected from sensors and or process measurement
points. However, not all of these signals are equally valuable in a specific
monitoring system. The measured signals contain a combination of useful
information, irrelevant information as well as noise. It is often the case
that useful information is buried in the latter two. Engineers typically
have a much larger number of signals than are actually required. If we
consider each type of signal as a feature, then feature selection may be
applied to identify the most relevant signals. The Process Engineers may
then use these signals to determine key factors contributing to yield
excursions downstream in the process. This will enable an increase in
process throughput, decreased time to learning and reduce the per unit
production costs.
To enhance current business improvement techniques the application of
feature selection as an intelligent systems technique is being investigated.
The dataset presented in this case represents a selection of such features
where each example represents a single production entity with associated
measured features and the labels represent a simple pass/fail yield for in
house line testing, figure 2, and associated date time stamp. Where –1
corresponds to a pass and 1 corresponds to a fail and the data time stamp
is for that specific test point.
Using feature selection techniques it is desired to rank features according
to their impact on the overall yield for the product, causal relationships
may also be considered with a view to identifying the key features.
Results may be submitted in terms of feature relevance for predictability
using error rates as our evaluation metrics. It is suggested that cross
validation be applied to
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