- 1、本文档共7页,可阅读全部内容。
- 2、原创力文档(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
- 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载。
- 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
- 5、该文档为VIP文档,如果想要下载,成为VIP会员后,下载免费。
- 6、成为VIP后,下载本文档将扣除1次下载权益。下载后,不支持退款、换文档。如有疑问请联系我们。
- 7、成为VIP后,您将拥有八大权益,权益包括:VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
- 8、VIP文档为合作方或网友上传,每下载1次, 网站将根据用户上传文档的质量评分、类型等,对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档
查看更多
半导体生产过程控制数据(SECOM SEmi COnductor Manufacturing process control data)_机器学习_科研数据集
半导体生产过程控制数据(SECOM: SEmi
COnductor Manufacturing process control data)
数据摘要:
Abstract: A complex modern semi-conductor manufacturing process
is normally under consistent surveillance via the monitoring of
signals/variables collected from sensors and or process measurement
points. However, not all of these signals are equally valuable in a specific
monitoring system. The measured signals contain a combination of useful
information, irrelevant information as well as noise. It is often the case
that useful information is buried in the latter two. Engineers typically
have a much larger number of signals than are actually required. If we
consider each type of signal as a feature, then feature selection may be
applied to identify the most relevant signals. The Process Engineers may
then use these signals to determine key factors contributing to yield
excursions downstream in the process. This will enable an increase in
process throughput, decreased time to learning and reduce the per unit
production costs.
To enhance current business improvement techniques the application of
feature selection as an intelligent systems technique is being investigated.
The dataset presented in this case represents a selection of such features
where each example represents a single production entity with associated
measured features and the labels represent a simple pass/fail yield for in
house line testing, figure 2, and associated date time stamp. Where –1
corresponds to a pass and 1 corresponds to a fail and the data time stamp
is for that specific test point.
Using feature selection techniques it is desired to rank features according
to their impact on the overall yield for the product, causal relationships
may also be considered with a view to identifying the key features.
Results may be submitted in terms of feature relevance for predictability
using error rates as our evaluation metrics. It is suggested that cross
validation be applied to
您可能关注的文档
- 初中学生英语单词大全(带音标).xls
- 初中物理单位换算习题.doc
- 初中毕业学业考试研究性质命题原则规范与建议.ppt
- 初中英语初一 if条件句.doc
- 初中英语单词(中考必背学习的武器学习的武器.doc
- 初中英语六年级下册经典诵读材料.doc
- 初中英语句型转换练习Pattern shift.doc
- 初中英语基础词汇与句型练习学习的武器学习的武器.doc
- 初中英语常用语法.pdf
- 初中英语形容词,副词比较级和最高级的用法和训练.doc
- 2025年高考物理真题完全解读(上海卷).doc
- 2025年高考数学真题分类汇编——等式不等式(全国通用)(解析版).doc
- 精品解析:2022年湖北省咸宁市、孝感市中考语文真题(原卷版).doc
- 2025年吉林省中考-语文.doc
- 精品解析: 2025年甘肃省白银市中考英语真题(原卷版).doc
- 精品解析:2022年山东省德州市中考语文真题(解析版).doc
- 精品解析:2022年山东省德州市中考语文真题(原卷版).doc
- 精品解析:2022年青海省中考语文真题(原卷版).doc
- 精品解析:2022年宁夏回族自治区中考语文真题(原卷版).doc
- 精品解析:2022年内蒙古通辽市中考语文真题(原卷版).doc
最近下载
- 八项规定回头看自查报告.pdf VIP
- 2012北京 第一册市政道路、桥梁工程预算定额.pdf VIP
- 华为LTC流程IPD流程ITR流程三大核心流程变革一篇文章就全明白啦V2.0!.pdf VIP
- 普洱哈尼族彝族自治县2025年数学五年级第二学期期末学业质量监测试题含答案.doc VIP
- D-ZD2010发电厂汽水管道支吊架设计手册制造图册-中国电力规划.pdf VIP
- 产科急救应急预案.docx VIP
- 关于社区卫生服务中心五年发展规划十五五发展规划2025.docx VIP
- NBT 25085-2018 核电厂常规岛焊接技术规程.pdf VIP
- 烟草代办合同范本6篇.docx VIP
- 危险废物污染防治责任制度.docx VIP
文档评论(0)