《偏压对钛薄膜显微组织及力学性能的影响（英文版）》.pdfVIP

Trans. Nonferrous Met. Soc. China 24(2014) 2870−2876 Effect of bias voltage on microstructure and nanomechanical properties of Ti films 1 2 2 2 2 2 Ying-long LIU , Fang LIU , Qian WU , Ai-ying CHEN , Xiang LI , Deng PAN 1. School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, Chin