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TRC—2020型磁控溅射镀膜机低温泵的设计考虑.pdf
维普资讯
TRC-2020型磁控溅射镀膜机
低温泵的设计考虑
任 家生
(东南大学)
Design Consideration of Cryopum p for M agnetron
Sputtering Coater TRC—T ype 2020
en Jiasheng
(S。uthea8tUniversity)
A bstract
In this paper．the oryopum p type ZDB一200 for sput~,ering coatsr is desig—
ned．The main param eters of refrigerating cryopump type ZDB-200
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